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电容式电子测压器的边缘效应分析
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  • 英文篇名:Edge effect analysis of capacitive electronic pressure measuring device
  • 作者:吴哲琼 ; 范锦彪 ; 王雪姣
  • 英文作者:WU Zheqiong;FAN Jinbiao;WANG Xuejiao;National Key Laboratory for Electronic Measurement Technology,North University of China;Key Laboratory of Instrumentation Science and Dynamic Measurement,Ministry of Education,North University of China;
  • 关键词:电容传感器 ; 边缘效应 ; 同轴柱状 ; Maxwell
  • 英文关键词:capacitance sensor;;edge effect;;coaxial columnar;;Maxwell
  • 中文刊名:SYCS
  • 英文刊名:China Measurement & Test
  • 机构:中北大学电子测试技术国家重点实验室;中北大学仪器科学与动态测试教育部重点实验室;
  • 出版日期:2018-05-31
  • 出版单位:中国测试
  • 年:2018
  • 期:v.44;No.238
  • 基金:国防科技重点实验室基金项目(04011007)
  • 语种:中文;
  • 页:SYCS201805027
  • 页数:5
  • CN:05
  • ISSN:51-1714/TB
  • 分类号:150-154
摘要
为克服电容式传感器的边缘效应问题,提高电容式电子测压器的测量精度,将测压器简化成同轴柱状电容,利用Ansoft Maxwell软件对同轴柱状电容的结构参数进行仿真,主要包括内外筒的轴向长度、外筒厚度、内筒厚度、内外筒间距4个参数,通过Matlab进行数据处理,分析在不同参数下电容传感器电容的变化情况,为后续对电容式电子测压器的结构参数优化提供依据。仿真结果表明:对传感器测试性能影响较大的是内外筒的轴向长度和内外筒的间距,内外筒轴向长度越长、筒间距越小边缘效应越小;内、外筒的厚度对测量精度也有一定影响,厚度越大边缘效应影响越大。
        In order to overcome the edge effect of capacitance-type senser, improve the measuring accuracy of electronic capacitive pressure measuring device, the pressure measuring devicewas simplified into a coaxial columnar capacitor, and the structural parameters of the coaxial columnar capacitor were simulated with the Ansoft Maxwell software. The parameters mainly include the axial length of the inner and outer cylinders, the thickness of the outer and inner cylinders, and the distance between the inner and outer cylinders. The data were processed via Matlab to analyze the capacitance changing situation of capacitive sensor under different parameters, providing a basis for further optimization of the structural parameters of the electronic capacitive pressure measuring device. The simulation results showthat the axial length of the inner and outer cylinders, the distance between the inner and outer cylinders have greater impact on sensor test performance. The edge effect will be smaller with the longer axial length of the inner and outer cylinders and the smaller cylinder distance. The thickness of the inner and outer cylinders also has a certain influence on the measuring accuracy, and the edge effect will be greater when the thickness is greater.
引文
[1]王化祥,张淑英.传感器原理及应用[M].天津:天津大学出版社,2014:63-79.
    [2]孙辉,韩玉龙,倪程鹏.电容式传感器原理解析及其应用举例[J].科技创新导报,2016(33):48-50.
    [3]熊葵容,倪德儒.电容传感器的边缘效应[J].传感器世界,1998(3):16-20.
    [4]江昌龙.计及边缘效应的非平行板电容器的电容计算[J].大学物理,2015(5):22-24,29.
    [5]文耀华.应用于高精度主轴回转误差监测的柱状电容传感器研究[D].杭州:浙江大学,2012.
    [6]李政清.微小型电容式压力测试仪的研究[D].太原:中北大学,2012.
    [7]PAUL S,BIRD J Z.Improved analytic model for eddy current force considering edge-effect of a conductive plate[C]∥2016 XXII International Conference on Electrical Machines Lausanne.ICME,2016.
    [8]雷建华.极板间距对平行板电容边缘效应的影响研究[J].电脑与电信,2013(7):57-58.
    [9]雷建华.极板厚度对电容边缘效应影响的理论和仿真分析[J].电脑与电信,2013(8):52-53,55.
    [10]武嘉俊,陈昌鑫,马铁华,等.基于Ansoft的容栅传感器边缘效应分析[J].仪表技术与传感器,2016(2):1-3,11.
    [11]KRIYANG S,JUGHUTT S,ALADIN Z.Modelling and analysis of fringing and metal thickness effects in MEMS parallel plate capacitors[C]∥Microelectronics,MEMS,and Nanotechnology.International Society for Optics and Photonics,2005.
    [12]BOONCHAROEN W,CHUSAK L,PROESPICHAYA K.Development and application of a real-time capacitive sensor[J].Biosensors and Bioelectronics,2011,26(5):2466-2472.
    [13]邵学涛.基于电容传感原理的电子测压器的研究[D].太原:中北大学,2011.
    [14]卢彦玲.基于测压器壳体的电容式传感器探测技术的研究[D].太原:中北大学,2014.
    [15]王惠玲,李宝生.基于边缘效应的圆环式电容传感器电场仿真分析[J].传感器与微系统,2014(4):31-34.
    [16]MALLORY M,GWANG U J,DONG H K,et al.Edge effects in bottom-gate inverted staggered thin-film transistors[J].IEEE Transactions on Electron Devices,2012,59(9):2501-2506.

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