基于应变式传感器的压电陶瓷定位系统设计
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摘要
基于压电陶瓷驱动的纳米扫描和定位系统,是原子力显微镜系统的关键部件。设计了基于电阻式应变传感器(SGS)的压电陶瓷微纳米位移定位系统。该系统在硬件上采用仪表放大器对SGS应变信号进行RF滤波、放大、模拟滤波处理得到与压电陶瓷位移变化线性相关的电压信号,该信号由高精度AD采集,并通过控制器输出到上位机软件MATLAB中进行噪声分析、FIR数字滤波去噪、线性度分析。实验结果表明,该位移检测系统输出电压噪声峰峰值小于0.5 m V,输出非线性误差小于0.06%,可实现2 nm的位移分辨率。该定位系统可以应用于原子力显微镜的开发中。
PZT actuator for nano-positioning and scanning is one of key device in atomic force microscopy. A piezoelectric ceramic nano-positioning system based on strain gauge sensor was designed. In the system,the voltage signal that is linearly related to the change of the piezoelectric ceramic displacement is obtained by using the instrument amplifier to filter,amplify and simulate the SGS strain signal by RF filtering. The voltage signal is collected by high precision AD and analyzed by noise and FIR digital filtering and linear fitting in MATLAB. The experiment results show that the output voltage noise peak value of the circuit is less than 0.5 mV,and the output nonlinear error is less than 0.06%,the displacement resolution of 2 nm can be achieved. Therefore,the designed actuator can be used to atomic force microscopy system.
PZT actuator for nano-positioning and scanning is one of key device in atomic force microscopy. A piezoelectric ceramic nano-positioning system based on strain gauge sensor was designed. In the system,the voltage signal that is linearly related to the change of the piezoelectric ceramic displacement is obtained by using the instrument amplifier to filter,amplify and simulate the SGS strain signal by RF filtering. The voltage signal is collected by high precision AD and analyzed by noise and FIR digital filtering and linear fitting in MATLAB. The experiment results show that the output voltage noise peak value of the circuit is less than 0.5 mV,and the output nonlinear error is less than 0.06%,the displacement resolution of 2 nm can be achieved. Therefore,the designed actuator can be used to atomic force microscopy system.
引文
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[2]赵碧杉,尹达一,曾攀,等.高精度大功率压电陶瓷驱动关键技术[J].压电与声光,2013,35(5):853-857.
[3]许素安,金玮,梁宇恩,等.压电陶瓷迟滞神经网络建模与线性补偿控制[J].传感技术学报,2017,30(12):1884-1889.
[4]徐运扬,徐康康,沈平. AFM压电陶瓷驱动器类Hammerstein建模与参数辨识[J].传感技术学报,2015,28(1):23-27.
[5]张泉,尹达一,李清灵.高分辨率压电陶瓷微位移检测电路设计与实现[J].压电与声光,2017,39(6):903-906.
[6]蒋志涛,刘品宽,温志杰.基于LVDT和SGS的微定位嵌入式控制系统[J].仪表技术与传感器,2011(8):82-84.
[7]王丽江,陈松月,刘清君,等.纳米技术在生物传感器及检测中的应用[J].传感技术学报,2006,19(3):581-587.
[8]陈力颖,倪立强,汤勇,等. CMOS脉搏血氧采集传感器信号处理电路[J].传感技术学报,2018,31(3):350-354.
[9]葛川,李朋志,徐立松,等.电阻应变式位移传感器电路设计与实现[J].国外电子测量术,2015,34(5):58-61.
[10]鲁鹏,周磊,于鹏,等.周期性背景光对四象限光电探测器的影响及解决方法研究[J].仪器仪表学报,2011,32(增刊6):208-211.
[11]赵毅强,李旭,赵公元,等.一种可配置数字滤波器设计及其ASIC实现[J].中南大学学报,2017,48(4):990-995.
[12]王洪涛,黄云彪,黄鸿.激光气体分析仪中数字滤波器的设计[J].中国光学,2013,6(5):729-735.