热阴极电离真空计电参数校准装置电流源设计与仿真分析
|
摘要
针对热阴极电离真空计电参数校准装置中电流源设计的关键技术,本文提出一种用于真空计电参数校准的内置单运放电流源及其非理想化低频等效模型,并通过PSPICE仿真对电路性能进行分析。装置适用于100 MΩ～100 GΩ负载条件,负载为1 GΩ时输出电流相对变化率为0.3×10~(-6)。解决了当前热阴极电离真空计电参数校准装置电流源不适用于低位离子流采样的超高电离真空计的问题,达到校准不同型号热阴极电离真空计离子流放大器的效果,为电参数校准装置的研制提供理论依据及参考。
In view of the current source design technology used in hot cathode ionization vacuum gauge electrical parameter calibration device,a single OPAMP based power supply is proposed.And a non-idealized model is set up to analyze the power supply as mentioned.The correctness of the model is verified by PSPICE simulation,and a comprehensive simulation analysis of the circuit performance is performed.The relative change rate of the output current at 1 GΩ is 0.3 ppm and the device adapt to 100 MΩ～100 GΩ load.The device as mentioned solves the problem that the current source of the hot cathode ionization vacuum gauge electric parameter calibration device is not suitable for the ultra-high ionization vacuum gauge of low-position ion current sampling.It has the ability to calibrate different types of hot cathode ionization vacuum gauge ion current amplifiers and provides theoretical basis and reference for the development of ionization vacuum gauge electrical parameter calibration device.
In view of the current source design technology used in hot cathode ionization vacuum gauge electrical parameter calibration device,a single OPAMP based power supply is proposed.And a non-idealized model is set up to analyze the power supply as mentioned.The correctness of the model is verified by PSPICE simulation,and a comprehensive simulation analysis of the circuit performance is performed.The relative change rate of the output current at 1 GΩ is 0.3 ppm and the device adapt to 100 MΩ～100 GΩ load.The device as mentioned solves the problem that the current source of the hot cathode ionization vacuum gauge electric parameter calibration device is not suitable for the ultra-high ionization vacuum gauge of low-position ion current sampling.It has the ability to calibrate different types of hot cathode ionization vacuum gauge ion current amplifiers and provides theoretical basis and reference for the development of ionization vacuum gauge electrical parameter calibration device.
引文
[1] 卢耀文,陈旭,李得天,等.便携式真空计校准装置[J].真空科学与技术学报,2013,33(05):462-467
[2] Stekleins A,Gerins E,Kromanis A.Vacuum Gauge Performance Verification System[J].Annals of DAAAM & Proceedings,2016:607-615
[3] Fedchak J A,Abbott P J,Hendricks J H,et al.Review Article:Recommended Practice for Calibrating Vacuum Gauges of the Ionization Type[J].Journal of Vacuum Science & Technology A Vacuum Surfaces & Films,2018,36(3):030802
[4] 李得天.热阴极与冷阴极电离规计量学特性比较研究[J].真空与低温,2003,9(2):85-92
[5] Grzesik B,Stepien M,Bodzek K,et al.Tests of a Vacuum Gauge for an HTS Hydrogenerator[C].Proceedings of 14th International Power Electronics and Motion Control Conference EPE-PEMC 2010.IEEE,2010:T15-13-T15-16
[6] 全国压力计量委员会.电离真空计:JJF 1062-1999[S].北京:中国计量出版社,1999:6-7
[7] 田东旭,孟扬.真空计电参数检定装置[J].宇航计测技术,1996(06):14-20
[8] 刘波,丁立莉,刘卿,等.几种热阴极电离真空计电参数校准及分析[J].真空与低温,2012,18(02):101-106
[9] Macias R,Seoane F,Bragos R.Performance of the Load-in-the-Loop Single Op-Amp Voltage Controlled Current Source From the Op-Amp Parameters[C].Journal of Physics:Conference Series IOP Publishing,2010,224(1):012008
[10] Groβe-Bley W.A Hot Cathode Ionization Gauge Transmitter for Industrial Vacuum Measurement[J].Vacuum,1998,51(1):31-37
[2] Stekleins A,Gerins E,Kromanis A.Vacuum Gauge Performance Verification System[J].Annals of DAAAM & Proceedings,2016:607-615
[3] Fedchak J A,Abbott P J,Hendricks J H,et al.Review Article:Recommended Practice for Calibrating Vacuum Gauges of the Ionization Type[J].Journal of Vacuum Science & Technology A Vacuum Surfaces & Films,2018,36(3):030802
[4] 李得天.热阴极与冷阴极电离规计量学特性比较研究[J].真空与低温,2003,9(2):85-92
[5] Grzesik B,Stepien M,Bodzek K,et al.Tests of a Vacuum Gauge for an HTS Hydrogenerator[C].Proceedings of 14th International Power Electronics and Motion Control Conference EPE-PEMC 2010.IEEE,2010:T15-13-T15-16
[6] 全国压力计量委员会.电离真空计:JJF 1062-1999[S].北京:中国计量出版社,1999:6-7
[7] 田东旭,孟扬.真空计电参数检定装置[J].宇航计测技术,1996(06):14-20
[8] 刘波,丁立莉,刘卿,等.几种热阴极电离真空计电参数校准及分析[J].真空与低温,2012,18(02):101-106
[9] Macias R,Seoane F,Bragos R.Performance of the Load-in-the-Loop Single Op-Amp Voltage Controlled Current Source From the Op-Amp Parameters[C].Journal of Physics:Conference Series IOP Publishing,2010,224(1):012008
[10] Groβe-Bley W.A Hot Cathode Ionization Gauge Transmitter for Industrial Vacuum Measurement[J].Vacuum,1998,51(1):31-37