基于能陷理论的石英力敏谐振器集群的设计

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英文篇名：Design of the Quartz Force-Sensitive Resonators Cluster Using Energy Trapping Theory 作者：陈福彬 ; 田文杰 ; 高锦春 英文作者：CHEN Fubin;TIAN Wenjie;GAO Jinchun;Sensor Key Laboratory, Beijing Information Science and Technology University;School of Electronic Engineering, Beijing University of Posts and Telecommunications; 关键词：厚度剪切石英晶体 ; 石英力敏谐振器集群 ; 能陷理论 ; 力传感器 英文关键词：thickness-shear quartz crystal;;quartz force-sensitive resonator cluster;;energy trapping theory;;force sensor 中文刊名：YDSG 英文刊名：Piezoelectrics & Acoustooptics 机构：北京信息科技大学传感器重点实验室;北京邮电大学电子工程学院; 出版日期：2019-06-15 出版单位：压电与声光 年：2019 期：v.41;No.246 基金：北京市自然科学基金重点资助项目(KZ201511232037);; 北京市教育委员会科技计划基金资助项目(KM201511232022);; 现代控制技术教育部重点实验室(北京信息科技大学)基金资助项目 语种：中文; 页：YDSG201903007 页数：5 CN：03 ISSN：50-1091/TN 分类号：30-33+37

摘要

石英谐振器可以作为传感器的敏感元件。为了减小温度等因素的干扰,提高石英晶体谐振器力敏特性,通过能陷理论及其厚度剪切石英晶体谐振能量分布曲线的计算,在同一圆形晶片上设计了多电极力敏谐振器集群。根据共模抑制原理,将谐振器集群输出频率信号作差频处理,以此抑制温度等因素的干扰,再将差频信号叠加以提高石英晶体谐振器集群整体力敏特性。实验结果表明,石英谐振器集群差频输出的温频特性明显优于传统的单电极谐振器,石英晶体谐振器集群整体力灵敏度系数提高到9 992 Hz/N。
        The quartz resonator can be used as the sensing element of sensor. In order to reduce the interference of temperature and other factors as well as improve the force sensitivity of quartz crystal resonators, a cluster of multi-electrode force-sensitive resonators is designed on the same wafer based on the energy trapping theory and the calculation of the resonant energy distribution curve of the thickness-shearing quartz crystal. According to the principle of common mode suppression, the output frequency signal of the resonator cluster is subjected to differential frequency processing to suppress the interference of temperature and other factors, and then the differential frequency signals are superimposed to improve the overall force sensitivity of the quartz crystal resonator cluster. The experimental results show that the temperature-frequency characteristics of the differential frequency output of the quartz resonator cluster are significantly better than the conventional single-electrode resonator, and the overall force sensitivity coefficient of the quartz crystal resonator cluster is increased to 9 992 Hz/N.

引文

[1] SHI J J,FAN C Y,ZHAO M H,et al.Variational analysis of thickness-shear vibrations of a quartz piezoelectric plate with two pairs of electrodes as an acoustic wave filter[J].Int J Appl Electromagn Mech,2015,47(4):951-961.
    [2] HE H J,LIU J X,YANG J S.Analysis of a monolithic crystal plate acoustic wave filter[J].Ultrasonics,2011,51(5):991-996.
    [3] ZHAO Z N,QIAN Z H,WANG B,et al.Analysis of thickness-shear and thickness-twist modes of AT-cut quartz acoustic wave resonator and filter[J].Appl Math Mech,2015,36(12):1527-1538.
    [4] SHOCKLEY W,CURRAN D R,KONEVAL D J.Trapped-energy modes in quartz filter crystals[J].J Acoust Soc Am,2005,41(4B):981-993.
    [5] TIAN W J,SUN Y B,ZHOU H Y,et al.Force-frequency sensitive character of quartz resonator with same base and different electrode[J].Advances in Intelligent and Soft Computing,2012,162(12):9-14.
    [6] HUANG X H,WANG Y,TANG X Y,et al.Energy trapping in low phase noise bulk acoustic wave oscillators[J].Chin Phys Lett,2012,29(10):100602.
    [7] 徐东,高文根,王金桥.LLC谐振变换器的分析和设计[J].重庆理工大学学报(自然科学),2018(1):166-173.XU Dong,GAO Wengen,WANG Jinqiao.Design and analysis of LLC resonant[J].Journal of Chongqing University of Technology(Natural Science),2018(1):166-173.