表面锥形梁结构引起的石英谐振器的频率漂移分析

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• 英文论文题名：Analysis on frequency shift of a quartz crystal resonator induced by surface conical microbeams
• 论文作者：崔之健 ; 罗驰 ; 孔令成 ; 胡元太
• 英文论文作者：CUI Zhijian ; LUO Chi ; KONG Lingcheng ; HU Yuantai ; College of Petroleum Engineering ; Xi'an Shiyou University ; Department of Mechanics ; Huazhong University of Science and Technology
• 年：2016
• 作者机构：西安石油大学石油工程学院;华中科技大学力学系;
• 论文关键词：石英晶体谐振器 ; 微梁 ; 有限差分法 ; 频率漂移
• 英文论文关键词：quartz crystal resonator ; microbeams ; finite difference method ; frequency shift
• 会议召开时间：2016-08-21
• 会议录名称：2016’中国西部声学学术交流会论文集
• 语种：中文
• 分类号：TN752.2
• 学会代码：SXJS
• 会议名称：2016’中国西部声学学术交流会
• 会议地点：中国四川成都
• 主办单位：中国声学学会微声学分会、中国声学学会物理声学分会、陕西省声学学会、浙江省声学学会、山东省声学学会、上海市声学学会、黑龙江省声学学会、水声技术重点实验室、重庆市声学学会、西安市声学学会、四川省声学学会
• 学会名称：《声学技术》编辑部
• 页数：4
• 文件大小：355k
• 原文格式：D
• 会议级别：全国

摘要

本文研究了由表面锥形微梁阵列和石英晶体板组成的复合谐振器系统的厚度剪切振动问题。首先,我们从电弹性理论和Euler梁理论出发,建立了表面锥形微梁阵列/石英晶体谐振器复合系统的耦合动力学方程及其交界面条件。然后通过有限差分法,得到了系统的频率漂移随微梁弹性模量、微梁密度以及微梁长度的周期性变化规律,进而阐明了出现这些周期性变化特征的根本原因。
In this paper, the thickness-shear vibrations of a composite resonator system consisting of surface conical microbeams and a quartz crystal plate were studied. Firstly, the coupling dynamic equations and the corresponding interface conditions of the composite system were established based on the electroelasticity theory and the Euler beam theory. Then by means of finite difference method, dependence of frequency shift of the composite system upon elastic modulus, density and length of microbeams were numerically obtained and it is found that there present cyclic characteristic features. Finally, the causes to present such cyclic characteristics were enucleated.

引文

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