GaAs/A1GaAs材料V型腔可调谐激光器的设计制作及在生物检测上的应用
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摘要
在现今的社会中,由于人们生活习惯和饮食问题,心脑血管疾病的患者人数逐年增长,已经极大地影响到了人类的健康和生存情况,对心血管疾病的预防和诊治成为人们亟需解决的重要问题之一。在众多解决措施之中,如何在早期准确的预测和预防是最具成本效益的方案,基于GaAs/AlGaAs材料的可调谐激光器凭借其对应于生命检测波段的出光波长、优秀的单纵模和波长可变的性能,半导体器件易于集成的特性,可以随时随地有效的监测人体血液各项重要参数,成为对抗心血管疾病的关键。本文主要研究基于GaAs/AlGaAs材料的V型腔可调谐激光器的结构设计、工艺制作、性能测试和在人体血液检测中的应用。
本文首先介绍了V型腔激光器的基本结构组成和工作原理,推导了V型腔激光器的阈值条件。根据激光器的需求,设计了量子阱结构和晶片层状结构,优化了激光器的波导结构和V型腔结构,得到最大的波长可调谐范围,对应激光器结构优化了半波耦合器的尺寸,得到激光器输出最佳的边模抑制比。
之后我们详细介绍了在GaAs/AlGaAs材料上,V型腔激光器的工艺制作流程。针对光刻工艺、波导/反射面深刻蚀区刻蚀工艺、平坦化工艺、正N/背面电极工艺和晶片背面减薄抛光工艺都作了分析,特别针对刻蚀工艺,针对其掩模的选择、干湿法工艺的选择、干法刻蚀配方的选择和优化做了详细的分析。最后我们成功制作出了基于GaAs/AlGaAs材料的V型腔激光器。
然后我们详述了激光器的性能测试。介绍了激光器测试的系统结构和设备组成。通过对F-P激光器的测试,了解GaAs/AlGaAs材料上激光器的IV、IP特性和腔镜面损伤的现象,分析了干湿法刻蚀工艺对腔镜面损伤闽限的影响。介绍了V型腔激光器调谐过程的载流子注入效应和热效应的作用机理,测试了两种效应下V型腔激光器的调谐性能,在载流子注入效应作用下,激光器输出边模抑制比31dB,配合温度控制,激光器可调谐27个信道,调谐范围8.2nm,在热效应的作用下,激光器输出边模抑制比36dB,单个温度下,激光器可调谐31个信道,配合温度控制,可调谐60个信道,调谐范围22.4nm。
我们提出了一个反射式人体血液检测系统,介绍了在这个系统中测试血氧饱和度和血流速度的原理,将V型腔激光器用于这个系统之中,并测得了实验结果。提出了调频连续波技术检测人体血糖浓度的方案,搭建了原理性检测实验系统,测得了一些实验结果并做了分析。
最后是对激光器设计制作和在生物检测上的应用进行下一步工作的展望。
In the modern society, high-fat, high-calorie and high-salt eating habits and sedentary life style contribute a lot to the increasing rate of cardiovascular and cerebrovascular diseases. Prevention, diagnosis and treatment of those diseases impose a heavy burden on both individuals and goverment. Early and accurate prediction and prevention is the most cost-effective solution to these problems. Tunable laser based on GaAs/AlGaAs material system, with its output wavelength corresponding to the life-detection optical band, excellent single longitudinal mode and wavelength tunable performance, ease of integration, can be used to monitor some important parameters in human blood regardless of place and time, which is a key components against those disease. This paper studied the structure design, fabrication, testing and blood parameters detection of the V-coupled-cavity laser based on GaAs/AlGaAs material system.
We first introduced the basic structure and the working principle of the V-coupled cavity laser, derived the threshold condition of the laser. Designed a quantum well structure and the wafer layer structure for the V-coupled cavity laser based on GaAs/AlGaAs material system.Optimized the waveguide structure and the V cavity structure to obtain the maximum wavelength tuning range, optimized the size of the coupler to obtain the best performance of output side mode suppression ratio (SMSR).
After that we described the fabrication processes of the V cavity laser based on GaAs/AlGaAs material system in detail. The step such as photolithography process, etching process for waveguide and deep etching aera, the planarization process, the front and back electrode, wafer backside thinning and polishing process are analyzed, in particular for the etching process, for which the choice of the mask, dry and wet etching process selection, dry etching recipe selection and optimization of a detailed analysis. Finally, we successfully fabricated the V-coupled cavity laser based on GaAs/AlGaAs material system.
Then we described the laser performance tests, introduced the configuration and equipment constitutes of the test system. Through the FP laser testing, informed the IV/IP characteristics of GaAs/AlGaAs material based laser and the phenomenon of the catastrophic optical mirror destruction (COMD), analyzed the role of wet etching process on the COMD phenomenon. Introduced the tuning mechanism of the V cavity laser based on carrier injection effect and thermal effect. Under the carrier injection effect, the laser output SMSR is31dB, with the temperature control, the laser can be tuned27channels, the tuning range is8.2nm, under the thermal effect, the laser output SMSR is36dB, he laser can be tuned31channels on single stable temperature, with the temperature control,60channels tunable with tuning range of22.4nm is achieved.
We proposed a reflective human blood detection system, introduced the principle to detect oxygen saturation and blood flow velocity, the V-cavity lasers is used in this system, and some results was obtained. Proposed a method to detect the concentration of blood glucose with frequency modulated continuous wave (FMCW) technology, builded a validation experiment testing system, some results was obtained and analyzed.
Finally, we discussed the future research plans fot the laser design, fabrication and applications in biological detection.
本文首先介绍了V型腔激光器的基本结构组成和工作原理,推导了V型腔激光器的阈值条件。根据激光器的需求,设计了量子阱结构和晶片层状结构,优化了激光器的波导结构和V型腔结构,得到最大的波长可调谐范围,对应激光器结构优化了半波耦合器的尺寸,得到激光器输出最佳的边模抑制比。
之后我们详细介绍了在GaAs/AlGaAs材料上,V型腔激光器的工艺制作流程。针对光刻工艺、波导/反射面深刻蚀区刻蚀工艺、平坦化工艺、正N/背面电极工艺和晶片背面减薄抛光工艺都作了分析,特别针对刻蚀工艺,针对其掩模的选择、干湿法工艺的选择、干法刻蚀配方的选择和优化做了详细的分析。最后我们成功制作出了基于GaAs/AlGaAs材料的V型腔激光器。
然后我们详述了激光器的性能测试。介绍了激光器测试的系统结构和设备组成。通过对F-P激光器的测试,了解GaAs/AlGaAs材料上激光器的IV、IP特性和腔镜面损伤的现象,分析了干湿法刻蚀工艺对腔镜面损伤闽限的影响。介绍了V型腔激光器调谐过程的载流子注入效应和热效应的作用机理,测试了两种效应下V型腔激光器的调谐性能,在载流子注入效应作用下,激光器输出边模抑制比31dB,配合温度控制,激光器可调谐27个信道,调谐范围8.2nm,在热效应的作用下,激光器输出边模抑制比36dB,单个温度下,激光器可调谐31个信道,配合温度控制,可调谐60个信道,调谐范围22.4nm。
我们提出了一个反射式人体血液检测系统,介绍了在这个系统中测试血氧饱和度和血流速度的原理,将V型腔激光器用于这个系统之中,并测得了实验结果。提出了调频连续波技术检测人体血糖浓度的方案,搭建了原理性检测实验系统,测得了一些实验结果并做了分析。
最后是对激光器设计制作和在生物检测上的应用进行下一步工作的展望。
In the modern society, high-fat, high-calorie and high-salt eating habits and sedentary life style contribute a lot to the increasing rate of cardiovascular and cerebrovascular diseases. Prevention, diagnosis and treatment of those diseases impose a heavy burden on both individuals and goverment. Early and accurate prediction and prevention is the most cost-effective solution to these problems. Tunable laser based on GaAs/AlGaAs material system, with its output wavelength corresponding to the life-detection optical band, excellent single longitudinal mode and wavelength tunable performance, ease of integration, can be used to monitor some important parameters in human blood regardless of place and time, which is a key components against those disease. This paper studied the structure design, fabrication, testing and blood parameters detection of the V-coupled-cavity laser based on GaAs/AlGaAs material system.
We first introduced the basic structure and the working principle of the V-coupled cavity laser, derived the threshold condition of the laser. Designed a quantum well structure and the wafer layer structure for the V-coupled cavity laser based on GaAs/AlGaAs material system.Optimized the waveguide structure and the V cavity structure to obtain the maximum wavelength tuning range, optimized the size of the coupler to obtain the best performance of output side mode suppression ratio (SMSR).
After that we described the fabrication processes of the V cavity laser based on GaAs/AlGaAs material system in detail. The step such as photolithography process, etching process for waveguide and deep etching aera, the planarization process, the front and back electrode, wafer backside thinning and polishing process are analyzed, in particular for the etching process, for which the choice of the mask, dry and wet etching process selection, dry etching recipe selection and optimization of a detailed analysis. Finally, we successfully fabricated the V-coupled cavity laser based on GaAs/AlGaAs material system.
Then we described the laser performance tests, introduced the configuration and equipment constitutes of the test system. Through the FP laser testing, informed the IV/IP characteristics of GaAs/AlGaAs material based laser and the phenomenon of the catastrophic optical mirror destruction (COMD), analyzed the role of wet etching process on the COMD phenomenon. Introduced the tuning mechanism of the V cavity laser based on carrier injection effect and thermal effect. Under the carrier injection effect, the laser output SMSR is31dB, with the temperature control, the laser can be tuned27channels, the tuning range is8.2nm, under the thermal effect, the laser output SMSR is36dB, he laser can be tuned31channels on single stable temperature, with the temperature control,60channels tunable with tuning range of22.4nm is achieved.
We proposed a reflective human blood detection system, introduced the principle to detect oxygen saturation and blood flow velocity, the V-cavity lasers is used in this system, and some results was obtained. Proposed a method to detect the concentration of blood glucose with frequency modulated continuous wave (FMCW) technology, builded a validation experiment testing system, some results was obtained and analyzed.
Finally, we discussed the future research plans fot the laser design, fabrication and applications in biological detection.
引文
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