引线键合系统设计理论与关键技术
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摘要
本文以开发面向引线键合的高速、高精密定位平台为目标,系统深入的研究了三自由度高速、高精度定位平台的结构设计、动力学建模、高频超声换能器优化设计以及相应的匹配电路等关键技术,并研制了引线键合精密定位平台样机。设计了一种基于音圈电机直接驱动、新型弹性解耦的三自由度高速、高精度引线键合定位平台。利用虚拟样机技术建立了精密定位平台的刚—弹耦合模型,并利用定位平台的动态响应确定了最佳的弹簧刚度及预紧力,利用有限元方法对弹性铰链进行了优化设计。对引线键合精密定位平台的静、动态特性进行了实验研究,实验结果表明引线键合精密定位平台的动态性能良好,达到了封装平台的设计要求。
设计了98kHz高频超声换能器。建立了系统的机电等效电路,根据一维弹性波理论推导出其纵向振动频率方程,确定了98kHz超声换能器的初始参数。依据系统的谐振特性进行优化设计,得到了其最佳结构参数。对系统的阻抗特性、轴向、径向振动传递特性进行了测试,实验结果表明具有良好的振动特性。
基于复杂可编程逻辑器件(CPLD)技术,设计了具有频率自动跟踪功能的超声换能器系统驱动电源。该电源具有放大、滤波、电路匹配及锁相频率跟踪等功能,通过超声换能器的振动传递特性实验,验证了驱动电源的有效性。
对引线键合定位平台进行了相关实验,对平台进行了性能测试。结果表明,平台定位最大位移为50mm,最大速度可达到0.5m/s;最大加速度可达到7.5g;重复定位精度可达到±2μm,满足芯片封装等领域的极限高速、高精度需求。研究工作为引线键合精密定位平台的进一步研究奠定了基础,也为相关定位系统研究理论提供借鉴方法和实践经验。
In this dissertation, for developing a wire bonding system with the high-speed, high-precision positioning, some key technologies, such as innovation structural design, dynamic modeling, optimization of high-frequency ultrasound transducer and the corresponding matching circuit, of the 3-DOF high-speed, high-precision positioning table are studied systematically. The prototype of wire bonding precision positioning table has been developed.
A new flexibility decoupling of high-speed, high-precision positioning wire bonding table with three freedoms, which is driven directly by voice coil motor, is designed. On the basis of building rigid-elastic coupling model of the precise positioning table by using virtual prototyping technology, the optimal spring stiffness and preload are determined based on dynamic response of positioning table, and the spring stiffness and preload the elastic joint structure is analyzed by using finite element method. The static and dynamic characteristics of the wire bonding precision positioning table is tested. The experiment results show that the dynamic performance of wire bonding precision positioning table is good, and it can satisfy the design requirements of the packaging table.
The 98kHz high-frequency ultrasound transducer system are designed based on electromechanical equivalent circuit of this system and longitudinal vibration frequency equation deduced by using one-dimensional elastic wave theory. The initial parameters of it are determined. Then, they are optimized according to the resonator characteristics of this system. It is measured for the impedance characteristics and transmission characteristics in the direction of axial and radial vibration, and the experimental results show that it has a good vibration transmission characteristic. Based on Complicated Programmable Logic Devices (CPLD) technology, a driven power for wire bonding ultrasonic transducer system is designed. It has functions and so on amplification, filter, electric circuit match and phase-lock frequency track. Tests for vibration transfer characteristics of wire bonding ultrasonic transducer system are carried out, and the design validity of wire bonding ultrasonic transducer system is verified.
A correlative performance experimental of wire bonding positioning table is tested. The results show that the maximum displacement of table is 50mm, the maximum speed and acceleration can attain 0.5m/s and 7.9g respectively, the repetition positioning precision achieve±2μm. It can also meet the requirements of limit high speed and accuracy in areas such as chip packaging.
The study of this dissertation lays a foundation for the further research of wire bonding precision positioning table, and supplies referenced methods and practical experience for theoretical research of the relevant positioning system.
设计了98kHz高频超声换能器。建立了系统的机电等效电路,根据一维弹性波理论推导出其纵向振动频率方程,确定了98kHz超声换能器的初始参数。依据系统的谐振特性进行优化设计,得到了其最佳结构参数。对系统的阻抗特性、轴向、径向振动传递特性进行了测试,实验结果表明具有良好的振动特性。
基于复杂可编程逻辑器件(CPLD)技术,设计了具有频率自动跟踪功能的超声换能器系统驱动电源。该电源具有放大、滤波、电路匹配及锁相频率跟踪等功能,通过超声换能器的振动传递特性实验,验证了驱动电源的有效性。
对引线键合定位平台进行了相关实验,对平台进行了性能测试。结果表明,平台定位最大位移为50mm,最大速度可达到0.5m/s;最大加速度可达到7.5g;重复定位精度可达到±2μm,满足芯片封装等领域的极限高速、高精度需求。研究工作为引线键合精密定位平台的进一步研究奠定了基础,也为相关定位系统研究理论提供借鉴方法和实践经验。
In this dissertation, for developing a wire bonding system with the high-speed, high-precision positioning, some key technologies, such as innovation structural design, dynamic modeling, optimization of high-frequency ultrasound transducer and the corresponding matching circuit, of the 3-DOF high-speed, high-precision positioning table are studied systematically. The prototype of wire bonding precision positioning table has been developed.
A new flexibility decoupling of high-speed, high-precision positioning wire bonding table with three freedoms, which is driven directly by voice coil motor, is designed. On the basis of building rigid-elastic coupling model of the precise positioning table by using virtual prototyping technology, the optimal spring stiffness and preload are determined based on dynamic response of positioning table, and the spring stiffness and preload the elastic joint structure is analyzed by using finite element method. The static and dynamic characteristics of the wire bonding precision positioning table is tested. The experiment results show that the dynamic performance of wire bonding precision positioning table is good, and it can satisfy the design requirements of the packaging table.
The 98kHz high-frequency ultrasound transducer system are designed based on electromechanical equivalent circuit of this system and longitudinal vibration frequency equation deduced by using one-dimensional elastic wave theory. The initial parameters of it are determined. Then, they are optimized according to the resonator characteristics of this system. It is measured for the impedance characteristics and transmission characteristics in the direction of axial and radial vibration, and the experimental results show that it has a good vibration transmission characteristic. Based on Complicated Programmable Logic Devices (CPLD) technology, a driven power for wire bonding ultrasonic transducer system is designed. It has functions and so on amplification, filter, electric circuit match and phase-lock frequency track. Tests for vibration transfer characteristics of wire bonding ultrasonic transducer system are carried out, and the design validity of wire bonding ultrasonic transducer system is verified.
A correlative performance experimental of wire bonding positioning table is tested. The results show that the maximum displacement of table is 50mm, the maximum speed and acceleration can attain 0.5m/s and 7.9g respectively, the repetition positioning precision achieve±2μm. It can also meet the requirements of limit high speed and accuracy in areas such as chip packaging.
The study of this dissertation lays a foundation for the further research of wire bonding precision positioning table, and supplies referenced methods and practical experience for theoretical research of the relevant positioning system.
引文
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