Nanocrystals: Templated Solid-State Dewetting of Thin Silicon Films (Small 44/2016)

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• 作者：Meher Naffouti ; Thomas David ; Abdelmalek Benkouider ; Luc Favre ; Anne Delobbe ; Antoine Ronda ; Isabelle Berbezier and Marco Abbarchi
• 刊名：Small
• 出版年：2016
• 出版时间：November 23, 2016
• 年：2016
• 卷：12
• 期：44
• 页码：6114
• 全文大小：2957K
• ISSN：1613-6829

文摘

Templated solid-state dewetting of thin silicon films allows for the deterministic nucleation and positioning of Si- and SiGe-based nanocrystals in complex assemblies, as presented by M. Abbarchi and co-workers on page 6115. The dewetting dynamics are guided by pattern size and shape controlling the number, size, shape, and position of the particles. Islands dimensions and relative distances are in the hundreds of nm range and fluctuate ≈11% and ≈5%, respectively.