Formation of oxide films for high-capacitance aluminum electrolytic capacitor by liquid-phase deposition and anodizing

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• 作者：Masatoshi Sakairi ; Ryota Fujita and Shinji Nagata
• 刊名：Surface and Interface Analysis
• 出版年：2016
• 出版时间：August 2016
• 年：2016
• 卷：48
• 期：8
• 页码：899-905
• 全文大小：4390K
• ISSN：1096-9918

文摘

Liquid-phase deposition (LPD) treatment and anodizing were used to form oxide layer for a high-capacitance aluminum electrolytic capacitor. Formation of protective oxide layers and modification of LPD conditions make it possible to prolong the LPD duration and lead to the formation of TiO₂ and NaF deposits on aluminum. A titanium oxide/aluminum oxide mixed layer was formed by a combination process of LPD treatment and anodizing. The capacitance of the formed layer was about 300% higher than that of an anodic oxide film formed on electropolished aluminum. The structures and compositions of the films that were formed were determined by transmission electron microscopy, scanning electron microscopy, and Rutherford backscattering spectroscopy. Copyright