Facile Fabrication of Silicon Nanotube Arrays and Their Application in Lithium-Ion Batteries

详细信息    查看全文

• 作者：Young-You Kim ; Han-Jung Kim ; Jun-Ho Jeong ; Jihye Lee ; Jun-Hyuk Choi ; Joo-Yun Jung ; Jeong-Hwa Lee ; Horchhong Cheng ; Ki-Won Lee and Dae-Geun Choi
• 刊名：Advanced Engineering Materials
• 出版年：2016
• 出版时间：August 2016
• 年：2016
• 卷：18
• 期：8
• 页码：1349-1353
• 全文大小：1521K
• ISSN：1527-2648

文摘

In this study, the authors report for the first time a wafer-scale method for fabricating vertical-aligned silicon nanotubes (SiNTs) on a silicon substrate using a combination of nanoimprint lithography (NIL) and metal-assisted chemical etching (MaCE) processes. The structural properties and adhesion strength characteristics of the prepared SiNTs are investigated via field emission scanning electron microscope (FE-SEM), transmission electron microscope (TEM) analysis, and adhesion test. And, the authors successfully demonstrate the feasibility of using the fabricated SiNTs in a Li-ion battery (LIB) anode, and their potential to enhance LIB technologies.