文摘
In this study, the authors report for the first time a wafer-scale method for fabricating vertical-aligned silicon nanotubes (SiNTs) on a silicon substrate using a combination of nanoimprint lithography (NIL) and metal-assisted chemical etching (MaCE) processes. The structural properties and adhesion strength characteristics of the prepared SiNTs are investigated via field emission scanning electron microscope (FE-SEM), transmission electron microscope (TEM) analysis, and adhesion test. And, the authors successfully demonstrate the feasibility of using the fabricated SiNTs in a Li-ion battery (LIB) anode, and their potential to enhance LIB technologies.