Spontaneous Patterning of High-Resolution Electronics via Parallel Vacuum Ultraviolet

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• 作者：Xuying Liu ; Masayuki Kanehara ; Chuan Liu ; Kenji Sakamoto ; Takeshi Yasuda ; Jun Takeya and Takeo Minari
• 刊名：Advanced Materials
• 出版年：2016
• 出版时间：August 17, 2016
• 年：2016
• 卷：28
• 期：31
• 页码：6568-6573
• 全文大小：1455K
• ISSN：1521-4095

文摘

A spontaneous patterning technique via parallel vacuum ultraviolet is developed for fabricating large-scale, complex electronic circuits with 1 μm resolution. The prepared organic thin-film transistors exhibit a low contact resistance of 1.5 kΩ cm, and high mobilities of 0.3 and 1.5 cm² V⁻¹ s⁻¹ in the devices with channel lengths of 1 and 5 μm, respectively.