Structural characterization and low-temperature properties of Ru/C multilayer monochromators with different periodic thicknesses
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- 作者：Hui Jiang ; Yan He ; Yumei He ; Aiguo Li ; Hua Wang ; Yi Zheng and Zhaohui Dong
- 关键词：multilayer ; cryogenic cooling ; interdiffusion ; interfacial roughness ; stress
- 刊名：Journal of Synchrotron Radiation
- 出版年：2015
- 出版时间：November 2015
- 年：2015
- 卷：22
- 期：6
- 页码：1379-1385
- 全文大小：1186K
- ISSN：1600-5775
文摘
Ru/C multilayer monochromators with different periodic thicknesses were investigated using X-ray grazing-incidence reflectivity, diffuse scattering, Bragg imaging, morphology testing, etc. before and after cryogenic cooling. Quantitative analyses enabled the determination of the key multilayer structural parameters for samples with different periodic thicknesses, especially the influence from the ruthenium crystallization. The results also reveal that the basic structures and reflection performance keep stable after cryogenic cooling. The low-temperature treatment smoothed the surfaces and interfaces and changed the growth characteristic to a low-frequency surface figure. This study helps with the understanding of the structure evolution of multilayer monochromators during cryogenic cooling and presents sufficient experimental proof for using cryogenically cooled multilayer monochromators in a high-thermal-load undulator beamline.