文摘
Fine metal masks (FMM) have always been a critical manufacturing tool for the fabrication (SBS) AMOLED panels. In this work, we suocfc eRs/sGfu/lBly fsaibdrei-cbayt-esidd ae ssterruiecst uoref tOo LcEonDf irdmev itchees maanndu faacctitvuer inmga fteriaxs ipbailniteyl sw iitnh oau th uysbirnigd pFeMrfoMrm taonolcse. s Fharovme coomupr ateixbplee rliifme-etnimtael trdeantad,s aanlld othfe tshaem ed eJvVicBe characteristics after photolithography process.