A parallel acquisition charged particle energy analyser using a magnetic field

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• 作者：C.G.H. Walker ; X. Zha and M.M. El Gomati
• 刊名：Surface and Interface Analysis
• 出版年：2017
• 出版时间：January 2017
• 年：2017
• 卷：49
• 期：1
• 页码：34-46
• 全文大小：1604K
• ISSN：1096-9918

文摘

A new form of charged particle energy analyser is proposed. It is broadly based on the 180° magnetic spectrograph, but is intended to detect charged particles moving out of the dispersion plane with a helical motion. The analyser has the capability to acquire charged particle energy spectra over a large energy range, similar to those acquired in Auger electron spectroscopy, ca. 2500 eV and large angular range, up to 90°, in parallel. These conditions are more favourable for surface analysis by electron spectroscopy at high vacuum, where for example an electron energy resolution of 0.2% to 0.5% is typical. Expressions showing how the landing positions of the charged particles on the detector vary as a function of energy and polar take off angle are determined as well as the conditions for optimum energy resolution at a range of polar take off angles. The equations reveal that in general, the device obtains the highest resolution at angles of revolution greater than 180°. The design is simple and could be easily put into practice using available material and technologies and be used to analyse the energies of electrons emitted from a sample placed in a scanning electron microscope. It can be made to function with a primary electron beam of any desired energy and could fit in to the small space between the sample and the end of an electron column. However, the device is difficult to retrofit into existing SEMs and ideally an SEM column needs to be designed to work in association with the analyser. The direction of the magnetic field of the analyser is coincident with the axis of the electron gun so that the primary beam is little influenced by the magnetic field and symmetry can be maintained in the primary beam electron column. Because the device is intended to acquire electron spectra in parallel, any movement of the primary beam on the sample because of a ramping field in the analyser is avoided. The field of view and the effect of the analyser upon the operation of the SEM are discussed. Spectra including elastic and Auger peaks reveal an energy resolution of ~4 eV at 900-eV electron energy. Copyright