Epitaxial <span id="mmlsi0013" class="mathmlsrc"><span class="formulatext stixSupport mathImg" data-mathURL="/science?_ob=MathURL&_method=retrieve&_eid=1-s2.0-S0022024815006120&_mathId=si0013.gif&_user=111111111&_pii=S0022024815006120&_rdoc=1&_issn=00220248&md5=a7baa394836a51d03186ecebceb66fc0" title="Click to view the MathML source">(Bi<sub>2sub>Se<sub>3sub>)span><span class="mathContainer hidden"><span class="mathCode">span>span>span> films were grown on the sapphire substrate by MOVPE at 460 °C.
Rhombohedral and orthorhombic films of <span id="mmlsi0008" class="mathmlsrc"><span class="formulatext stixSupport mathImg" data-mathURL="/science?_ob=MathURL&_method=retrieve&_eid=1-s2.0-S0022024815006120&_mathId=si0008.gif&_user=111111111&_pii=S0022024815006120&_rdoc=1&_issn=00220248&md5=9638f2a7ff1cc49a5a812c61bfb6f66c" title="Click to view the MathML source">(Bi<sub>1−xsub>Sb<sub>xsub>)<sub>2sub>Se<sub>3sub>span><span class="mathContainer hidden"><span class="mathCode">span>span>span> were deposited at 480 °C.
Rhombohedral <span id="mmlsi0014" class="mathmlsrc"><span class="formulatext stixSupport mathImg" data-mathURL="/science?_ob=MathURL&_method=retrieve&_eid=1-s2.0-S0022024815006120&_mathId=si0014.gif&_user=111111111&_pii=S0022024815006120&_rdoc=1&_issn=00220248&md5=3a5dfa4c8e1e57679639ebc0a192e01b" title="Click to view the MathML source">(Bi<sub>4sub>Se<sub>3sub>)span><span class="mathContainer hidden"><span class="mathCode">span>span>span> and Bi phases were obtained at lower temperatures.
Characterization of the films was carried out by Raman, XRD, AFM, SEM and EDS techniques.