The effect of surface roughness has been investigated in Micro and Nano scales according to the types of the surface roughness.
The micro cantilever (MC) modeling has been schemed based on the Multiple Couple Stress (MCS) Theory
The effect of roughness radius on the minimum and maximum amplitude of Piezoelectric MC has been studied based on the geometry of roughness in air environment.
The effect of environmental forces including van der Waals, Capillary and Contact Forces on the vibration amplitude of MC forms the basis of surface topography.