Investigation on the morphology and surface free energy of the AlGaN thin film
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- 作者：Soner Ö ; zena ; osoner@ogu.edu.tr" class="auth_mail" title="E-mail the corresponding author ; Volkan 艦enayb ; Suat Pata ; 艦adan Korkmaza
- 关键词：AlGaN thin film ; Thermionic vacuum arc ; Surface free energy ; XRD ; FESEM
- 刊名：Journal of Alloys and Compounds
- 出版年：2015
- 出版时间：25 December 2015
- 年：2015
- 卷：653
- 期：Complete
- 页码：162-167
- 全文大小：1615 K
文摘
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The nano structured AlGaN film is deposited on an amorphous glass substrate.
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AlGaN thin film is produced in a very short period of time.
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The surface free energy of the produced film was determined.
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The produced thin film shows p-type conductivity.