Homodyne full-field interferometer for measuring dynamic surface phenomena in microstructures
详细信息 查看全文
- 作者：Lauri Lipiä ; inen ; lauri.lipiainen@aalto.fi" class="auth_mail" title="E-mail the corresponding author ; Kimmo Kokkonen ; Matti Kaivola
- 关键词：Full-field interferometry ; Homodyne stabilized ; Micromechanics ; Dynamic behavior ; Surface deformation ; Time domain
- 刊名：Optics and Lasers in Engineering
- 出版年：2017
- 出版时间：January 2017
- 年：2017
- 卷：88
- 期：Complete
- 页码：178-183
- 全文大小：1071 K
文摘
- •
Stabilized interferometer for time-domain deflection measurements of microstructures.
- •
Camera-based stabilization concept enabling versatile, compact and low cost setup.
- •
Micromechanics measurements over wide height range and down to sub-nm resolution.
- •
Suitable for material characterization and single-event dynamic phenomena.
- •
Capabilities demonstrated with measurement of AlN-membrane pressure sensor.