Distinct detection of liquor ammonia by ZnO/SAW sensor: Study of complete sensing mechanism

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• 作者：V. Bhasker Raj^aAuthor Vitae ; Harpreet Singh^bAuthor Vitae ; A.T. Nimal^bAuthor Vitae ; M.U. Sharma^bAuthor Vitae ; Monika Tomar^cAuthor Vitae ; Vinay Gupta^d ; ^{drguptavinay@gmail.com" class="auth_mail" title="E-mail the corresponding author}Author Vitae
• 关键词：Surface acoustic wave ; Sensor ; Ammonia ; Elasticity ; Mass loading ; ZnO
• 刊名：Sensors & Actuators: B. Chemical
• 出版年：2017
• 出版时间：January 2017
• 年：2017
• 卷：238
• 期：Complete
• 页码：83-90
• 全文大小：2418 K

文摘

ZnO/SAW sensor was reported to give distinct response towards liquor ammonia. To study the complete mechanism, ZnO thin films (40 nm) were deposited using rf sputtering in different reactive gas composition of argon and oxygen. The increase in oxygen content (30–100%) during film growth leads to decrease in the value of stress and bond energy. The individual contribution of different SAW sensing mechanisms such as mass loading, elastic effects and acousto-electric interaction, was evaluated and analyzed to understand the distinct response for liquor ammonia. It was found that mass loading seems to get affected by the presence of stress whereas elastic loading was affected by the crystallite size and bond energy (ZnO) in ZnO thin films.