Femtosecond-pulsed laser micromachining and optical damage by an erbium-doped fiber-laser system

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• 作者：Toru Mizunami ; ^a ; ^{mizunami@elcs.kyutech.ac.jp"" rel=""nofollow} ; Akimasa Ehara¹ ; ^a
• 关键词：Micromachining ; Ablation ; Femtosecond pulse ; Fiber laser ; Erbium-doped fiber ; Thin film
• 刊名：Microelectronic Engineering
• 出版年：2011
• 出版时间：August 2011
• 年：2011
• 卷：88
• 期：8
• 页码：2334-2337
• 全文大小：423 K

文摘

Micromachining by ablation using a femtosecond erbium-doped fiber-laser system was studied. The system consisted of a passively mode-locked fiber-laser oscillator using a nonlinear-amplifying loop mirror, a pulse extractor, and a final amplifier. The output had a pulse width of 240 fs and a peak power of 25 kW at a repetition rate of 10 kHz. A 6-μm-wide ablation trace was obtained by focusing on an amorphous carbon film. For direct amplification without a pulse extractor, the repetition rate was 12 MHz, the peak power decreased to 5.1 kW, and the average power was 40 mW. For direct amplification, the ablation trace of the amorphous carbon film was as large as 16 μm wide. However, direct amplification was suitable for micromachining of plastics: cutting of polyvinyl chloride film with a width of 4 μm was performed. The optical damage was observed at a facet of a fiber-optic connector after an operation for 60 min by pulse extraction and amplification, whereas no damage was observed for direct amplification.