Tailoring of optical and wetting properties of sputter deposited silica thin films by glancing angle deposition

详细信息    查看全文

• 作者：Satyajit Sarkar ; Siddhartha Kumar Pradhan
• 关键词：Silica thin film ; Glancing angle deposition ; Sputtering
• 刊名：Applied Surface Science
• 出版年：30 January, 2014
• 年：2014
• 卷：290
• 期：Complete
• 页码：509-513
• 全文大小：1614 K

文摘

Synthesis of silica thin films by RF magnetron sputtering using glancing angle deposition (GLAD) has been reported here. Films deposited at four different oblique angles (45掳, 60掳, 75掳, 85掳) show transition from featureless to columnar structure. The silica films have been characterized for their optical and wetting properties and they exhibit potential for use in applications such as antireflection coatings, self-cleaning coatings, antifogging coatings, etc. The reflectance decreases to a minimum of 3.15% whereas transmittance increases to a maximum of 93.43% when the films have been deposited at an oblique angle of 85掳. Water contact angle measurements were done to show the hydrophilic nature of the films. The hydrophilicity of the films gets enhanced and a minimum water contact angle of 20掳 is achieved with increase in the oblique angle of deposition owing to the increase in the values of roughness.