Arrayed ultrasonic microsensors with high directivity for in-air use using PZT thin film on silicon diaphragms

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• 作者：Yamashita ; Kaoru ; Katata ; Hiroshi ; Okuyama ; Masanori ; Miyoshi ; Hiromi ; Kato ; Genro ; Aoyagi ; Seiji ; et. al.
• 关键词：Ultrasonic ; Array sensor ; PZT
• 刊名：Sensors and Actuators A: Physical
• 出版年：2002
• 出版时间：April 1, 2002
• 年：2002
• 卷：97-98
• 期：Complete
• 页码：302-307
• 全文大小：444 K

文摘

An ultrasonic microarray sensor using piezoelectric diaphragms has been fabricated and applied to recognition of a three-dimensional object. The sensor consists of piezoelectric PZT (Pb(Zr,Ti)O₃) thin film on 18 diaphragms of micromachined SOI wafer. The array is designed to obtain a sharp directivity considering wavelength of ultrasound in air and the chip size for micromachine applications. Three-dimensional images have been successfully obtained by scanning the sensor.