Fabrication of high aspect ratio solid-state supercapacitors Low leakage current density MIM capacitors as low as 10− 7 A/cm2 Typical capacitors behavior for the fabricated devices with strong breakdown and very low leakage current density Excellent method to estimate and calculate the area enhancement due to CNS using electroimpednce spectroscopy (EIS) Excellent agreement for the area calculations based on EIS with those obtained from aspect ratio analyzing