Etchant wettability in bulk micromachining of Si by metal-assisted chemical etching
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- 作者：Sung-Soo Yoon1 ; Yeong Bahl Lee1 ; Dahl-Young Khang ; dykhang@yonsei.ac.kr" class="auth_mail" title="E-mail the corresponding author
- 关键词：Si micromachining ; Metal-assisted chemical etching ; Etchant wettability ; Bilayer catalyst
- 刊名：Applied Surface Science
- 出版年：2016
- 出版时间：1 May 2016
- 年：2016
- 卷：370
- 期：Complete
- 页码：117-125
- 全文大小：3413 K
文摘
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Successful micromachining of Si using added low surface tension co-solvent.
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Complete suppression of unwanted generation of micro/nano structures.
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Smooth surface of micromachined Si structure for conformal contact and bonding.