Effect of self-bias on the elemental composition and neutron absorption of boron carbide films deposited by RF plasma enhanced CVD
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- 作者：A. Butea ; butearundhati@gmail.com" class="auth_mail" title="E-mail the corresponding author ; Jagannathb ; ssai@barc.gov.in" class="auth_mail" title="E-mail the corresponding author ; R. Kara ; rajibkar@barc.gov.in" class="auth_mail" title="E-mail the corresponding author ; S.S. Chopadea ; supriyagindalkar@rediffmail.com" class="auth_mail" title="E-mail the corresponding author ; S.S. Desaic ; ssdesai@barc.gov.in" class="auth_mail" title="E-mail the corresponding author ; M.N. Deod ; mndeo@barc.gov.in" class="auth_mail" title="E-mail the corresponding author ; Pritty Raoe ; praocccm@rediffmail.com" class="auth_mail" title="E-mail the corresponding author ; N. Chanda ; naresh@barc.gov.in" class="auth_mail" title="E-mail the corresponding author ; S. Kumare ; sanjivcccm@rediffmail.com" class="auth_mail" title="E-mail the corresponding author ; K. Singhf ; singhkw@barc.gov.in" class="auth_mail" title="E-mail the corresponding author ; D.S. Patilg ; dspatil@iitb.ac.in" class="auth_mail" title="E-mail the corresponding author ; S. Sinhaa ; ssinha@barc.gov.in" class="auth_mail" title="E-mail the corresponding author
- 关键词：Carbides ; Plasma-assisted CVD ; XPS ; FTIR
- 刊名：Materials Chemistry & Physics
- 出版年：2016
- 出版时间：1 October 2016
- 年：2016
- 卷：182
- 期：Complete
- 页码：62-71
- 全文大小：2868 K
文摘
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Boron carbide films were deposited by RF PECVD, varying substrate RF self-bias.
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B/C ratio increased with decreasing RF self-bias leading to boron rich BxC films.
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Total macroscopic cross section for neutrons Σt is found to increase with self-bias.
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Higher bias caused rise in oxygen impurity in films and decrease in film stability.