Structural, optical and electrical properties studies of ultrasonically deposited tin oxide (SnO2) thin films with different substrate temperatures
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- 作者：Achour Rahala ; c ; Atmane Benhaouaa ; b ; Mohamed Jlassid ; Boubaker Benhaouaa ; benhaouab@yahoo.fr" class="auth_mail" title="E-mail the corresponding author
- 关键词：Tin oxide ; Thin films ; Spray ultrasonic ; Four-point probe technique ; X-ray diffraction
- 刊名：Superlattices and Microstructures
- 出版年：2015
- 出版时间：October 2015
- 年：2015
- 卷：86
- 期：Complete
- 页码：403-411
- 全文大小：1373 K
文摘
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SnO2 thin films ultrasonically deposited with various substrate temperatures.
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The XRD analyses revealed that the deposited SnO2 have tetragonal structure.
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Transparency in the visible region of deposited SnO2 thin films is in range 43.8–75%.
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The resistivity is limited by the grain size at low substrate temperature.