Hard and soft micromachining for BioMEMS: review of techniques and examples of applications in microfluidics and drug delivery
详细信息 查看全文
- 作者：Ziaie ; Babak ; Baldi ; Antonio ; Lei ; Ming ; Gu ; Yuandong ; Siegel ; Ronald A.
- 关键词：Closed-loop insulin delivery ; MEMS ; Microfluidics ; Phenylboronic acid ; Hydrogels ; Glucose-sensitive
- 刊名：Advanced Drug Delivery Reviews
- 出版年：2004
- 出版时间：February 10, 2004
- 年：2004
- 卷：56
- 期：2
- 页码：145-172
- 全文大小：2.07 M
文摘
Recent development in microfabrication (micromachining, microelectromechanical systems, MEMS) permits the integration of hard and soft structures, and enables the design of controllable microfluidic systems, which may be applied to drug delivery. In this paper, we present a tutorial review of both classical “hard” and more recent “soft” micromachining techniques. We then provide examples where these techniques are combined to produce hydrogel-based microfluidic control systems. The most complex of these systems utilizes a very small hydrogel based on phenylboronic acid to control the flow of an insulin solution in response to changes in glucose concentration.