Fabrication of a 3 GHz oscillator based on Nano-Carbon-Diamond-film-based guided wave resonators
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- 作者：Rol ; Salut ; Celine Gesset ; Gilles Martin ; Badreddine Assouar ; Philippe Bergonzo ; Rodolphe Boudot ; Omar Elmazria ; Sylvain Ball ; ras
- 关键词：Surface Acoustic Wave ; E-beam lithography ; Nanocrystalline diamond ; RF resonator ; Oscillator
- 刊名：Microelectronic Engineering
- 出版年：2013
- 出版时间：December, 2013
- 年：2013
- 卷：112
- 期：Complete
- 页码：133-138
- 全文大小：2438 K
文摘
We have investigated the possibility to use carbon-diamond layers exhibiting nano-sized grains for the fabrication of SAW resonators. One of the main purpose was to check the influence of the grain size on the resonator¡¯s spectral signature and to evaluate the fabrication of high frequency sources along this approach. We have investigated various material combinations on Nano-Carbon-Diamond (NCD) layers grown along different techniques (nano-seeding, BEN, followed by MPCVD). The best configuration was based on ZnO/NCD material combination provided the piezoelectric layer was deposited on the so-called nucleation surface of the NCD. Numerous resonators have been fabricated on such substrates, allowing to characterize and exploit the resonance near 3 GHz. An oscillator then was built using such a configuration: its stability has been measured near 10-7 and its phase noise was found near ?100 dBc.Hz-1 at 10 kHz.