Aluminium nitride cubic modifications synthesis methods and its features. Review

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• 作者：V.S. Kudyakova ; ^{valeriya_kudyakova@mail.ru} ; R.A. Shishkin ; A.A. Elagin ; M.V. Baranov ; A.R. Beketov
• 关键词：Cubic aluminium nitride ; Properties ; Synthesis ; Metastable modifications ; Thermal conductivity
• 刊名：Journal of the European Ceramic Society
• 出版年：2017
• 出版时间：April 2017
• 年：2017
• 卷：37
• 期：4
• 页码：1143-1156
• 全文大小：1423 K
• 卷排序：37

文摘

This article presents a brief review of the research progress achieved in the field of aluminium nitride (AlN) metastable cubic modifications synthesis. It covers mainly the synthetic approaches, such as carbothermal reduction nitridation (CRN), chemical vapour deposition (CVD), solvent thermal synthesis, high pressure phase transition and thin-film technology (molecular beam epitaxy, atmospheric reactive plasma nitriding, magnetron sputtering, pulsed laser deposition). A classification of synthetic approaches has been proposed, which is based on the difference between the aluminium compounds involved in synthesis. The basics of cubic aluminium nitride stabilization and possible technological conditions for the synthesis of the metastable cubic phase have been formulated.