Niobium-niobium oxide multilayered coatings for corrosion protection of proton-irradiated liquid water targets for [18F] production
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- 作者：Hanna Skliarovaa ; b ; Hanna.Skliarova@lnl.infn.it" class="auth_mail" title="E-mail the corresponding author ; Marco Renzellic ; marco.renzelli@uniroma3.it" class="auth_mail" title="E-mail the corresponding author ; Oscar Azzolinia ; Oscar.Azzolini@lnl.infn.it" class="auth_mail" title="E-mail the corresponding author ; Daniele de Felicisc ; daniele.defelicis@uniroma3.it" class="auth_mail" title="E-mail the corresponding author ; Edoardo Bemporadc ; edoardo.bemporad@uniroma3.it" class="auth_mail" title="E-mail the corresponding author ; Richard R. Johnsond ; richard.johnson@teambest.com" class="auth_mail" title="E-mail the corresponding author ; Vincenzo Palmieria ; e ; Vincenzo.Palmieri@lnl.infn.it" class="auth_mail" title="E-mail the corresponding author
- 关键词：Sputtering ; Niobium ; Niobium oxide ; Multilayers ; X-ray diffraction ; Diffusion barrier ; Scanning electron microscopy ; Focus ion beam
- 刊名：Thin Solid Films
- 出版年：2015
- 出版时间：30 September 2015
- 年：2015
- 卷：591
- 期：part_PB
- 页码：316-322
- 全文大小：1256 K
文摘
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Diffusion barrier efficiency of niobium, niobium oxide and their multilayers was studied.
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The intercalation of niobium oxide layers interrupted the columnar grain growth of niobium.
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The bilayer architectures influenced the stability of the multilayer coatings.
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The thin layer multilayer coating with 70 nm double-layer was found superior.