Design, fabrication and characterization of multilayer Cr-CrN thin coatings with tailored residual stress profiles
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文摘

Cr-CrN multilayers are deposited by MS-PVD under controlled condition;

Residual stress profiles were evaluated by FIB-DIC micro ring-core milling;

Scratch test shows dependence of adhesion on residual stress profile, without changes in overall hardness and microstructure

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