Switch-matrix-based Monolithic CMOS Platform Featuring a Large Array of Carbon Nanotube Sensor Elements and a 96-channel Readout Circuitry

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• 作者：Alexandra Dudina^a ; ^b ; ^{alexandra.dudina@bsse.ethz.ch} ; Florent Seichepine^b ; Yihui Chen^a ; Alexander Stettler^a ; Andreas Hierlemann^a ; Urs Frey^a ; ^b ;
• 关键词：CNT-FETs ; dielectrophoresis ; switch matrix ; CMOS readout
• 刊名：Procedia Engineering
• 出版年：2016
• 出版时间：2016
• 年：2016
• 卷：168
• 期：Complete
• 页码：916-919
• 全文大小：422 K
• 卷排序：168

文摘

We present a monolithic CMOS biosensor system comprised of a switch-matrix-based array of carbon nanotube field-effect transistors (CNT-FETs) and an associated readout circuitry. The switch-matrix allows for flexible selection and simultaneous routing of 96 sensor elements to the readout channels. The resistances of the CNT-FETs were measured by applying a constant voltage and measuring the resulting current. Variation of the first-stage-amplifier gain and bandwidth allows for measuring resistances in the range between 50 kΩ and 20 MΩ at a bandwidth of up to 20 kHz. A parallel integration of the CNT-FETs has been achieved by using a floating electrode dielectrophoresis (DEP) manipulation technique.