Preparation and characterization of Al-doped ZnO piezoelectric thin films grown by pulsed laser deposition

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• 作者：A. Taabouche^a ; ^b ; ^{Adelphm@gmail.com" class="auth_mail" title="E-mail the corresponding author} ; A. Bouabellou^b ; F. Kermiche^b ; F. Hanini^b ; C. Sedrati^b ; Y. Bouachiba^b ; C. Benazzouz^c
• 关键词：Thin films ; ZnO ; Pulsed laser deposition ; Piezoelectric ; Waveguiding properties
• 刊名：Ceramics International
• 出版年：2016
• 出版时间：1 May 2016
• 年：2016
• 卷：42
• 期：6
• 页码：6701-6706
• 全文大小：696 K

文摘

Undoped and Al-doped ZnO (AZO) thin films (Al: 3, 5 at%) using a series of high quality ceramic targets have been deposited at 450 ºC onto glass substrates using PLD method. The used source was a KrF excimer laser (248 nm, 25 ns, 2 J/cm²). The study of the obtained thin films has been accomplished using X-ray diffraction (XRD), M-lines spectroscopy and Rutherford backscattering spectroscopy (RBS). XRD patterns have shown that the films crystallize in a hexagonal wurtzite type structure with a highly c-axis preferred (002) orientation, and the grain sizes decrease from 37 to 25 nm with increasing Al doping. The optical waveguiding properties of the films were characterized by means of the prism-coupling method. The distinct M-lines of the guided transverse magnetic (TM) and transverse electric (TE) modes of the ZnO films waveguide have been observed. The M-lines device has allowed determination of the accurate values of refractive index and thickness of the studied ZnO and AZO thin films. An evaluation of experimental uncertainty and calculation of the precision of the refractive index and thickness were developed on ZnO films. The RBS results agree with XRD and m-lines spectroscopy measurements.