An Al2O3 front contact passivation layer is introduced to Cu(In, Ga)Se2 solar cells.
The ALD Al2O3 is thin enough to allow for tunneling.
Detrimental effect of openings in buffer layer is mitigated by passivation.
CIGSe/Al2O3 interface exhibits lower defect density compared to CIGSe/ZnO interface.
Heat treatment during Al2O3 deposition induces a larger space charge region width.