A novel 3D absorption correction method for quantitative EDX-STEM tomography
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- 作者：Pierre Burdeta ; pierre.burdet@a3.epfl.ch" class="auth_mail" title="E-mail the corresponding author ; Z. Saghia ; A.N. Filippinb ; A. Borrá ; sb ; P.A. Midgleya
- 关键词：Energy dispersive X-ray spectrometry ; Electron tomography ; 3D chemical analysis ; Quantification ; Absorption correction
- 刊名：Ultramicroscopy
- 出版年：2016
- 出版时间：January 2016
- 年：2016
- 卷：160
- 期：Complete
- 页码：118-129
- 全文大小：4661 K
文摘
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A novel 3D absorption correction method is proposed for 3D EDX-STEM tomography.
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The absorption of X-rays along the path to the surface is calculated voxel-by-voxel.
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The method is applied on highly absorbed X-rays emitted from a core/shell nanowire.
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Absorption is shown to cause major artefacts in the reconstruction.
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Using the absorption correction method, the reconstruction artefacts are greatly reduced.