Fabrication and characterization of dual AFM probe with narrow-gapped silicon tips and switchable cantilevers with magneto-strictive FePd film actuator
A dual AFM probe with twin Si tips and cantilevers was fabricated. A 600 nm-gapped dual Si tip was fabricated through a self-aligning etching process. Fe60Pd40 (1 μm)/Si (2 μm) twin cantilevers were orthogonally located to each other. Each cantilever was individually deflected by magneto-striction for switching. The 1 μm-thick Fe60Pd40 film could generate magneto-striction above 250 ppm.