Design and fabrication of a low insertion loss capacitive RF MEMS switch with novel micro-structures for actuation

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• 作者：Muhua Li^a ; ^b ; ^c ; Jiahao Zhao^a ; ^b ; ^c ; ^{falxon@mail.tsinghua.edu.cn} ; Zheng You^a ; ^b ; ^c ; ^d ; Guanghong Zhao^e
• 关键词：Actuation ; Capacitive switch ; Up-state capacitance ; RF MEMS
• 刊名：Solid-State Electronics
• 出版年：2017
• 出版时间：January 2017
• 年：2017
• 卷：127
• 期：Complete
• 页码：32-37
• 全文大小：1688 K
• 卷排序：127

文摘

A capacitive RF MEMS switch with novel actuation structures has been developed. The switch is actuated by biasing the specially set actuation electrodes. The DC voltage and RF signals are decoupled. The capacitance area can be reduced without increasing the actuation voltage.