Fabrication of controllable mesh layers above SiNx micro pores with ZnO nanostructures

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• 作者：Yue Zhao^a ; ^b ; Cuifeng Ying^b ; ^c ; Qimeng Huang^b ; Yunsheng Deng^b ; Daming Zhou^b ; Deqiang Wang^b ; ¹ ; ^{dqwang@cigit.ac.cn} ; Wenqiang Lu^b ; ¹ ; ^{wqlu@cigit.ac.cn} ; Hong-Liang Cui^a ; ^b ; ¹ ; ^{hcui@jlu.edu.cn}
• 关键词：ZnO nanorod arrays ; Without catalysts ; Sealing ; SiNx ; Micropores ; DNA sequencing
• 刊名：Microelectronic Engineering
• 出版年：2017
• 出版时间：5 February 2017
• 年：2017
• 卷：169
• 期：Complete
• 页码：43-48
• 全文大小：683 K
• 卷排序：169

文摘

We proposed a method that ZnO nanowires can laterally grow around the pore edge on insulating film of SiNx. The three-dimensional (3D) ZnO nanowires structure integrated with micro-pore on SiNx film was demonstrated. We demonstrated the micrometer SiNx pore could be sealed with lateral ZnO nanowires.