Pulsed laser deposition of (WO₃)_1 ?#xa0;x(Nb₂O₅)_x thin films: Characterization and gasochromic studies

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• 作者：Chia-Hao  ; Hsu^a ; Chung-Chieh  ; Chang^a ;   ; ^{ccchang1978@phys.sinica.edu.tw} ; Kuo-Wei  ; Yeh^a ; Yu-Ruei  ; Wu^a ; Chih-Chieh  ; Chan^b ; Ming-Jye  ; Wang^c ; Mau-Kuen  ; Wu^a
• 关键词：Tungsten oxide ; Niobium oxide ; Gasochromic ; Hydrogen sensor ; PLD
• 刊名：Thin Solid Films
• 出版年：2011
• 出版时间：30 December 2011
• 年：2011
• 卷：520
• 期：5
• 页码：1470-1474
• 全文大小：1224 K

文摘

A series of (WO₃)_{1 ?x}(Nb₂O₅)_x (x = 0, 0.05, 0.1 and 0.15) mixed oxide films were fabricated by pulsed laser deposition (PLD) at 27 Pa oxygen partial pressure on ITO glass substrates. The thickness of the (WO₃)_{1 ?x}(Nb₂O₅)_x thin films is about 350 ¡À 30 nm and their surface has a uniform morphology. A layer of platinum (Pt) was then sputtered onto the surface of the film. The hydrogen gas sensing performance of Pt catalyst activated (WO₃)_{1 ?x}(Nb₂O₅)_x thin films were investigated. The cycling of the coloration was obtained from UV¨Cvis spectra. Gasochromic coloration of (WO₃)_{1 ?x}(Nb₂O₅)_x thin films were investigated at room temperature in H₂¨CN₂ mixtures containing 1?00 mol % of H₂. The results show that the shortest response time of (WO₃)_{1 ?x}(Nb₂O₅)_x/Pt hydrogen sensor is within 30 s and the highest transmittance change (¦¤T) varies from 20 % to 30 % .