Multi-analyte biosensors on a CF₄ plasma treated Nb₂O₅-based membrane with an extended gate field effect transistor structure

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• 作者：Chyuan-Haur Kao ; Hsiang Chen ; Lien-Tai Kuo ; Jer-Chyi Wang ; Yun-Ti Chen ; Yu-Cheng Chu ; Chian-You Chen ; Chao-Sung Lai ; Shan Wei Chang ; Che Wei Chang
• 关键词：Nb2O5 ; EGFET ; pH values ; CF4 ; Biosensors
• 刊名：Sensors and Actuators B: Chemical
• 出版年：April, 2014
• 年：2014
• 卷：194
• 期：Complete
• 页码：419-426
• 全文大小：3002 K

文摘

Multianalyte biosensors were fabricated with an Nb₂O₅ pH-sensitive membrane on silicon substrate in an EGFET structure. Incorporation of CF₄ plasma treatment with an appropriate time of 15 s was found to improve material properties and enhance performance. Multiple material analyses including XRD, AFM and SIMS indicate that CF₄ plasma treatment reduces dangling bonds and passivates defects by forming strong bonds. Results indicate that an Nb₂O₅-based EGFET exhibited good performance with a high degree of sensitivity, a low hysteresis voltage and a low drift rate. Overall sensing performance for various ions of Na⁺, K⁺, urea and glucose detection was also enhanced. Our research indicates that Nb₂O₅-based biosensors with CF₄ treatment show promise for future industrial biosensing applications.