Ordered silicon nanowire arrays prepared by an improved nanospheres self-assembly in combination with Ag-assisted wet chemical etching
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- 作者：Guobin Jia ; guobin.jia@ipht-jena.de" class="auth_mail" title="E-mail the corresponding author ; jiaguobin83@hotmail.com" class="auth_mail" title="E-mail the corresponding author ; Jasper Westphalen ; Jan Drexler ; Jonathan Plentz ; Jan Dellith ; Andrea Dellith ; Gudrun Andrä ; Fritz Falk
- 关键词：Ordered silicon nanowire array ; Langmui&ndash ; Blodgett ; Porous silicon ; Nanosphere lithography ; Ag-assisted wet chemical etching
- 刊名：Photonics and Nanostructures - Fundamentals and Applications
- 出版年：2016
- 出版时间：April 2016
- 年：2016
- 卷：19
- 期：Complete
- 页码：64-70
- 全文大小：2656 K
文摘
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An improved Langmuir–Blodgett (LB) process independent to surface states is presented.
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Issues in the nanosphere lithography combined with Ag-assisted wet chemical etching discussed.
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Experimental evidence of the origin of formation of porous structures.
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Ordered silicon nanowire array free of porous structure was prepared.
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Ordered silicon nanowire array with aspect ratio >100 was prepared.