Chemical wet etching of germanium assisted with catalytic-metal-particles and electroless-metal-deposition

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• 作者：Kazuki Ito ; ^{ito-kazuki-xc@ynu.jp" class="auth_mail" title="E-mail the corresponding author} ; Daichi Yamaura ; Toshio Ogino
• 关键词：Germanium ; Wet etching ; Lithium ion battery ; Surface structure ; Nano-structure
• 刊名：Electrochimica Acta
• 出版年：2016
• 出版时间：1 October 2016
• 年：2016
• 卷：214
• 期：Complete
• 页码：354-361
• 全文大小：2912 K

文摘

Ge nanostructures were fabricated by wet processes based on etching assisted with the catalytic-metal-particles and the electroless-metal-deposition under various conditions. In the etching assisted with catalytic-metal-particles, we used HF + H₂O₂ solutions after forming Ag particles on the Ge wafer surfaces from an AgNO₃ solution. We succeeded in fabrication of porous layers on the Ge substrates and found that the pore sidewall inclination angles with respect to the surfaces can be controlled by the H₂O₂ concentrations. In the etching assisted with electroless-metal-deposition, we fabricated whisker-like nanostructures and demonstrated that their size and morphology can be varied by changing the AgNO₃ concentration, deposition/etching time and the substrate resistivity. We have revealed differences between Ge and Si in the metal-catalyzed etching and pointed out problems in Ge nanowire fabrication via a wet chemical etching.