Features of the use of optical reflection from thin porous silicon for detection of organic liquids

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• 作者：Nickolai I. Klyui^a ; ^cAuthor Vitae ; Ivan I. Ivanov^b ; ^{ivancko@gmail.com}Author Vitae ; Oleksandr S. Kyslovets^bAuthor Vitae ; Lyubov V. Avksentyeva^cAuthor Vitae ; Valeriy A. Skryshevsky^b ; ^{skrysh@univ.kiev.ua}Author Vitae
• 关键词：Adsorption/desorption ; Thin films ; Porous silicon ; Chemical sensors ; Spectroscopy
• 刊名：Sensors and Actuators B: Chemical
• 出版年：2017
• 出版时间：April 2017
• 年：2017
• 卷：242
• 期：Complete
• 页码：1177-1185
• 全文大小：2623 K
• 卷排序：242

文摘

The properties of interference pattern of single porous silicon layers are considered to create the effective chemical sensors. Application of layers with certain parameters set results in the increase selectivity of single layer chemical sensors. In situ measurement of reflection spectra of growing layer at electrochemical Si etching alows to determine the parameters of growing porous layer on Si substrate. The efficient sensors for detection of different alcohol contained solutions were elaborated by measurement of steady state and kinetic modes of optical reflection.