A two-dimensional thermo-chemical reaction model is creatively built.
Thermal conductivity and heat capacity of β-Si3N4 are computed accurately.
The appropriate thermo-chemical reaction rate is fitted and reaction element length is set to assure the constringency.
The deepest ablated position was not the center of the ablated area due to plasma absorption.
The simulation results demonstrate the thermo-chemical process cant be simplified to be physical phase transition.