Design and fabrication of high-efficiency fibre couplers for nanophotonic devices
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- 作者：D.M. Beggs ; M. Ayre ; D.F.G. Gallagher ; T.F. Krauss
- 关键词：CAIBE ; Etching ; Indium phosphide ; Tapers ; Waveguides
- 刊名：Microelectronic Engineering
- 出版年：2007
- 出版时间：May-August 2007
- 年：2007
- 卷：84
- 期：5-8
- 页码：1446-1449
- 全文大小：990 K
文摘
A dual waveguide heterostructure device that couples light from single mode optical fibres into nanophotonic devices with an overall modelled efficiency of 81 % has been investigated. A four-stage taper design for the ridge waveguide which allows for a total device length of 610 μm is described. The fabrication of the ridge waveguide using chemically-assisted ion-beam etching has been optimised.