Error analysis and surface reconstruction for swing arm profilometry
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- 作者：Shanyong Chen ; mesychen@163.com" class="auth_mail" title="E-mail the corresponding author ; Yifan Dai ; Xiaoqiang Peng ; Shengyi Li
- 关键词：Surface profilometry ; Aspheric surface ; Surface reconstruction ; Error analysis ; Stitching
- 刊名：Measurement
- 出版年：2016
- 出版时间：June 2016
- 年：2016
- 卷：87
- 期：Complete
- 页码：1-12
- 全文大小：4002 K
文摘
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Analytical error model for swing arm profilometry.
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Error sources include axial, radial, tilt motions of rotary tables and misalignment.
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Surface reconstruction by stitching multiple intersectant traces.
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Error motions of the part rotary table are optimally recognized and then removed.
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Error motions of sub-milliradian scale are tolerant with surface reconstruction.