two-photon laser-assisted device alteration provides precision fault localization in advanced integrated circuits

spatial localization depends on the polarization state and the temporal overlap between the optical and electrical pulses

linear polarization shows a clear advantage as long as the preferred polarization direction can be identified

linear and radial polarizations provide better lateral localization resolutions than circular polarization

radial polarization, while giving good localization, led to distortion, possibly due to the longitudinal E-field component