Identification of 6H-SiC polar faces with pull-off force of atomic force microscopy
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- 作者：Di Gana ; Youting Songa ; Junwei Yanga ; Hongxiang Chena ; Liwei Guoa ; lwguo@iphy.ac.cn" class="auth_mail" title="E-mail the corresponding author ; Xiaolong Chena ; b ; chenx29@iphy.ac.cn" class="auth_mail" title="E-mail the corresponding author
- 关键词：Polar face identification ; SiC ; Pull-off force ; Atomic force microscopy
- 刊名：Applied Surface Science
- 出版年：2016
- 出版时间：30 December 2016
- 年：2016
- 卷：390
- 期：Complete
- 页码：917-923
- 全文大小：2120 K
文摘
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A new method is proposed and demonstrated to distinguish the polar faces of 6H-SiC by pull-off forces which are clearly different on the Si-face and the C-face of 6H-SiC.
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The reliability of this method is confirmed on 6H-SiC samples treated with different surface processing procedures.
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The essence of different pull-off forces on different polar faces of 6H-SiC is that the surface energies between them are obviously different.
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Theoretical calculations are consistent with our experimental results.