Surface characteristics for the TiAlN coatings deposited by high power impulse magnetron sputtering technique at the different bias voltages
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- 作者：H. Elmkhaha ; c ; Elmkhah@gmail.com" class="auth_mail" title="E-mail the corresponding author ; T.F. Zhangc ; A. Abdollah-zadehb ; K.H. Kimc ; d ; kwhokim@pusan.ac.kr" class="auth_mail" title="E-mail the corresponding author ; F. Mahboubie
- 关键词：Nanostructured TiAlN coatings ; HIPIMS ; Bias voltage ; Tribological properties ; Mechanical properties
- 刊名：Journal of Alloys and Compounds
- 出版年：2016
- 出版时间：15 December 2016
- 年：2016
- 卷：688
- 期：part_PA
- 页码：820-827
- 全文大小：2570 K
文摘
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In HIPIMS process, the bias voltage has an effect on the coating properties.
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Chemical composition of the TiAlN coating changes by increasing the bias voltage.
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The re-sputtering phenomenon has an influence on the TiAlN coating properties.
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The best mechanical properties of TiAlN was obtained at the bias voltage of −150 V.
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The best tribological properties of TiAlN was achieved at the bias voltage of −100 V.