An on-machine error calibration method for a laser micromachining tool
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- 作者：Jian-xiong Chena ; Shu-wen Lina ; Xiao-long Zhoub ; Yi-liu Tuc ; paultu@ucalgary.ca" class="auth_mail" title="E-mail the corresponding author
- 关键词：Geometric error ; Femtosecond laser ; On-machine measurement ; Error compensation
- 刊名：Precision Engineering
- 出版年：2017
- 出版时间：January 2017
- 年：2017
- 卷：47
- 期：Complete
- 页码：239-248
- 全文大小：2979 K
文摘
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A comprehensive calibration method for a micromachining using femtosecond laser.
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An increment error model is established to evaluate the error distribution.
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A simple calibration procedure is developed with hole drilling and groove milling.
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The errors of mechanical and optical system are measured and identified on-machine.